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MEMS Ultrasonic Sensor‌

MEMS ultrasonic sensor is a new type of sensor that combines microelectromechanical system (MEMS) technology with ultrasonic technology. It uses micro-machining processes to convert electrical energy into acoustic energy and vice versa, offering features such as miniaturisation and low power consumption. This makes it a flexible solution for both consumer electronics and industrial applications.
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The MEMS ultrasonic sensor with a 65 kHz resonance frequency achieves a balance between penetration and accuracy in complex industrial environments (wavelength in air approximately 5.2 mm).


Features

- Ultra-compact size: Volume approximately 20mm³

- Convenient for integration into various scenarios: Surface-mountable, no separate installation required

- FOV up to 180°, single chip achieves full-scene coverage

- Low-voltage drive: Achieves 110dB high sound pressure level at 10Vop low drive voltage
Mature manufacturing process: Based on semiconductor mass production high-precision micro-nano fabrication and packaging processes

Dimensions(mm)

65K-MEMS-SIZE-03.jpg

Specifications

ItemSpecifications
Resonant frequency65± 3.0 kHz
FOV180°
Operating voltage3~30Vop
Capacitance3.3± 3nF
Operating temperature  -20°C~+70℃
Storage temperature-40℃~+80℃

Applications

- Pallet depth detection for autonomous forklifts

- Collision prevention for aerial work platforms

- Detection for autonomous cleaning vehicles/gates

- Height monitoring for agricultural spray booms


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